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Monday, November 20, 2017
| Time | Event | |
| 08:30 - 09:30 | Breakfast and registration (Exhibition hall) | |
| 09:30 - 09:45 | Conference opening (Turing's amphitheater) | |
| 09:45 - 10:15 | Atomic Layer Etching: a precision technique to enable tomorrow's technology (Turing's amphitheater) - Stéphanie Baclet (Oxford Instruments, UK) | |
| 10:15 - 10:45 | Patterning challenges for ultimate CMOS scaling and beyond CMOS nanofabrication (Turing's amphitheater) - Jean-François de Marneffe (IMEC, Leuveu - Belgium) | |
| 10:45 - 11:00 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 10:45 - 11:00 | › Microstructuration of titanium for implantable components - Edouard Laudrel, Groupe de recherches sur l\'énergétique des milieux ionisés | |
| 11:00 - 11:20 | Coffee break (Exhibition hall) | |
| 11:20 - 11:35 | Flash poster session - Flash poster session 1/2 | |
| 11:35 - 11:50 | Integration of technologies (Turing's amphitheater) | |
| 11:35 - 11:50 | › Planar HfOx ReRAM in CMOS BEOL using nanodamascene process - Marina Labalette, Laboratoire des Nanotechnologies et Nanosystèmes | |
| 11:50 - 12:05 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 11:50 - 12:05 | › MOSFET III-V: from Planar to Ultra-Thin-Body and to Gate-All-Around design - Matej Pastorek, Institut d'électronique, de microélectronique et de nanotechnologie | |
| 12:05 - 14:00 | Lunch (Agora's restaurant) | |
| 14:00 - 14:30 | Nitride nanowire LEDs : from rigid to flexible devices (Turing's amphitheater) - Maria Tchernycheva (C2N - CNRS/UPSud, Orsay) | |
| 14:30 - 14:45 | Synthesis of materials (Turing's amphitheater) | |
| 14:30 - 14:45 | › Selective sublimation of GaN for top-down fabrication of nanostructures - Damilano Benjamin, Centre de recherche sur l'hétéroepitaxie et ses applications | |
| 14:45 - 15:15 | Nanoscale surface engineering by photon-assisted nanoimprint technology (Turing's amphitheater) - Angélique Luu-Dinh (CSEM, Nauchatel - Switzerland) | |
| 15:15 - 15:30 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 15:15 - 15:30 | › Environment-controlled sol-gel soft-NIL processing for optimized imprinting at sub-micron dimensions. - Thomas Bottein, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence | |
| 15:30 - 15:50 | Coffee break (Exhibition hall) | |
| 15:50 - 16:05 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 15:50 - 16:05 | › Fabrication of versatile calibration samples for 3D super-resolution optical imaging with <5nm Z resolution using greyscale e-beam lithography and Nano-Imprint replication - Alexandre LAUVERGNE, Laboratoire d'Analyse et d'Architecture des Systèmes [Toulouse] - Franck Carcenac, Laboratoire d'Analyse et d'Architecture des Systèmes [Toulouse] | |
| 16:05 - 16:25 | Exhibitor's session - Exhibitor's session | |
| 16:25 - 16:40 | Flash poster session - Flash poster session 2/2 | |
| 16:40 - 18:40 | Poster session / Lab. tour - Poster session / Lab. tour |
Tuesday, November 21, 2017
| Time | Event | |
| 08:00 - 08:30 | Breakfast (Exhibition hall) | |
| 08:30 - 09:00 | Surfaces and interfaces bioengineering: functionalization, characterization and application (Turing's amphitheater) - Vincent Humblot (LRS - UPMC, Paris and GDR B2i) | |
| 09:00 - 09:30 | Surface functionnalization and processing (Turing's amphitheater) | |
| 09:00 - 09:15 | › Gold nanorod aggregation in presence of thiolated oligonucleotides - Henryk Laszewski, Laboratoire de Biologie et de Pharmacologie Appliquée | |
| 09:15 - 09:30 | › Flexible long-range plasmon waveguides for single-mode optical interconnects applications - Laurent Markey, Laboratoire Interdisciplinaire Carnot de Bourgogne | |
| 09:30 - 10:00 | Nanoparticle assembly: controlling topography and capillary forces at the nanoscale to build functional devices (Turing's amphitheater) - Valentin Flauraud (EPFL, Lausanne - Switzerland) | |
| 10:00 - 10:20 | Coffee break (Exhibition hall) | |
| 10:20 - 10:35 | Surface functionnalization and processing (Turing's amphitheater) | |
| 10:20 - 10:35 | › Periodic nanostructures formed on mesoporous silicon surface using ultrashort pulse lasers - Nadjib SEMMAR, Groupe de recherches sur l'énergétique des milieux ionisés | |
| 10:35 - 10:50 | Integration of technologies (Turing's amphitheater) | |
| 10:35 - 10:50 | › How to build a Si NW-based transistor without nanoscale processing - Maxime Legallais, Laboratoire des matériaux et du génie physique [Grenoble], Laboratoire des technologies de la microélectronique | |
| 10:50 - 11:05 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 10:50 - 11:05 | › Sub-micrometer 2D patterned 2 inches wafer using interferential and soft-UV NIL combined nanolithographies techniques - CELINE CHEVALIER, Institut des Nanotechnologies de Lyon | |
| 11:05 - 11:35 | Controlling domain orientation in self-assembled block copolymer thin films for lithographic application (Turing's amphitheater) - Michele Perego (IMM-CNR, Milano - Italy) | |
| 11:35 - 12:05 | Integration of technologies (Turing's amphitheater) | |
| 11:35 - 11:50 | › Folding Photonic Crystals: Semiconductors ORIGAMI - Jean-Louis Leclercq, Institut des nanotechnologies de Lyon - Site d'Ecully | |
| 11:50 - 12:05 | › NANO-PROBING STATION INCORPORATING MEMS PROBES FOR 1D DEVICE RF ON-WAFER CHARACTERIZATION - Khadim Daffé, Institut d'électronique, de microélectronique et de nanotechnologie | |
| 12:05 - 14:00 | Lunch (Agora's restaurant) | |
| 14:00 - 14:30 | Applications of large area graphene monolayers to electronic and biomedical devices (Turing's amphitheater) - Vincent Bouchiat (Néel, Grenoble) | |
| 14:30 - 14:45 | Surface functionnalization and processing (Turing's amphitheater) | |
| 14:30 - 14:45 | › Molecularly Imprinted Polymer Nano layers for the electrochemical detection of pesticides - Sarra BOUDEN, Interfaces, Confinement, Matériaux et Nanostructures | |
| 14:45 - 15:00 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 14:45 - 15:00 | › MICROSTRUCTURING OF A CYLINDER BY COLLOIDAL PHOTOLITHOGRAPHY ON FUNCTIONAL TiO2 SOL-GEL - erieta katerina koussi, Laboratoire Huber Curien | |
| 15:00 - 15:30 | Physical properties and stability of 3D and layered perovskite materials for photovoltaic applications (Turing's amphitheater) - Jacky Even (INSA-FOTON, Rennes) | |
| 15:30 - 15:50 | Coffee break (Exhibition hall) | |
| 15:50 - 16:05 | Synthesis of materials (Turing's amphitheater) | |
| 15:50 - 16:05 | › IN SITU XPS CHARACTERISATION OF THE FIRST GROWTH STEPS OF SICN:H THIN FILMS FROM TETRAMETHYLSILANE-AMONIA MICROWAVE PLASMAS - Christophe Cardinaud, Institut des matériaux Jean Rouxel | |
| 16:05 - 16:20 | Surface functionnalization and processing (Turing's amphitheater) | |
| 16:05 - 16:20 | › Contribution to the understanding of the first stages of metal surface nanostructuration based on He+ implantation: experiments and simulations - Anne-Lise THOMANN, Groupe de Recherches sur l'Energétique des Milieux Ionisés | |
| 16:25 - 17:40 | Round table: companies and academics - Round table: companies and academics | |
| 17:40 - 18:40 | Poster session - Poster session | |
| 19:00 - 19:35 | Transportation - > to the castle | |
| 19:35 - 23:00 | Banquet (Gala dinner's castle) |
Wednesday, November 22, 2017
| Time | Event | |
| 08:00 - 08:30 | Breakfast (Exhibition hall) | |
| 08:30 - 09:00 | Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology (Turing's amphitheater) - Yoshio Mita (VDEC - Université de Tokyo, Japan) | |
| 09:00 - 09:45 | Integration of technologies (Turing's amphitheater) | |
| 09:00 - 09:15 | › SUBMILLIMETER MULTIJUNCTION SOLAR CELLS DESIGNED FOR VERY HIGH CONCENTRATION PHOTOVOLTAICS - Pierre Albert, Institut Interdisciplinaire d'Innovation Technologique, Laboratoire de l'Intégration du Matériau au Système | |
| 09:15 - 09:30 | › ZnO nanostructures for electronics : from transistors to nanogenerators - Guylaine POULIN-VITTRANT, GREMAN | |
| 09:30 - 09:45 | › Robotics assembly for Lab on Fiber new nanoprobes. - Jean-Yves Rauch, FEMTO-ST | |
| 09:45 - 10:15 | The Involvement of scientists in the ethical debate on nanotechnologies through a personal experience : current actions and perspectives (Turing's amphitheater) - Christophe Vieu (LAAS - CNRS, Toulouse) | |
| 10:15 - 10:35 | Coffee break (Exhibition hall) | |
| 10:35 - 10:50 | Renatech award : Elaboration de matériaux pour microbatterie 3D Li-ion par dépôt de couches atomiques (ALD) et caractérisations structurales operando (Turing's amphitheater) - Manon Letiche (IEMN, Villeneuve d'Ascq) | |
| 10:50 - 11:05 | Renatech award : Sélection et capture de biomarqueurs moléculaires et cellulaires dans un fluide complexe (Turing's amphitheater) - Hélène Cayron (LAAS - CNRS, Toulouse) | |
| 11:05 - 11:20 | Integration of technologies (Turing's amphitheater) | |
| 11:05 - 11:20 | › AlAs/InAlAs superlattice as a sacrificial layer for the epitaxial lift-off of low band gap III-V heterostructures lattice-matched to InP - François Chancerel, Laboratoire Nanotechnologies Nanosystèmes (LN2)- CNRS UMI-3463, Institut des nanotechnologies de Lyon | |
| 11:20 - 11:35 | Etching – Lithography – Nano-patterning (Turing's amphitheater) | |
| 11:20 - 11:35 | › Photolithography and transfer by reactive ion etching of high resolution features from an ecofriendly and water developpable chitosan resist - mathieu caillau, Institut des nanotechnologies de Lyon | |
| 11:35 - 11:50 | Integration of technologies (Turing's amphitheater) | |
| 11:35 - 11:50 | › Packaging of electronic devices using 3D printing technology - Gabrielle Aspar, Laboratoire dÉlectronique et des Technologies de lÍnformation | |
| 11:50 - 12:05 | Conference closure (Turing's amphitheater) | |
| 12:05 - 14:00 | Lunch (Agora's restaurant) |
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