Journées Nationales sur les Technologies Emergentes en micronanofabrication 2017

Mon. 20

Tue. 21

Wed. 22

08:00

09:00

10:00

11:00

12:00

13:00

14:00

15:00

16:00

17:00

18:00

19:00

20:00

21:00

22:00

23:00

Breakfast and registration

Conference opening

Atomic Layer Etching: a precision technique to enable tomorrow's technology

Patterning challenges for ultimate CMOS scaling and beyond CMOS nanofabrication

Etching – Lithography – Nano-patterning

Coffee break

Flash poster session

Integration of technologies

Etching – Lithography – Nano-patterning

Lunch

Nitride nanowire LEDs : from rigid to flexible devices

Synthesis of materials

Nanoscale surface engineering by photon-assisted nanoimprint technology

Etching – Lithography – Nano-patterning

Coffee break

Etching – Lithography – Nano-patterning

Exhibitor's session

Flash poster session

Poster session / Lab. tour

Breakfast

Surfaces and interfaces bioengineering: functionalization, characterization and application

Surface functionnalization and processing

Nanoparticle assembly: controlling topography and capillary forces at the nanoscale to build functional devices

Coffee break

Surface functionnalization and processing

Integration of technologies

Etching – Lithography – Nano-patterning

Controlling domain orientation in self-assembled block copolymer thin films for lithographic application

Integration of technologies

Lunch

Applications of large area graphene monolayers to electronic and biomedical devices

Surface functionnalization and processing

Etching – Lithography – Nano-patterning

Physical properties and stability of 3D and layered perovskite materials for photovoltaic applications

Coffee break

Synthesis of materials

Surface functionnalization and processing

Round table: companies and academics

Poster session

Transportation

Banquet

Breakfast

Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology

Integration of technologies

The Involvement of scientists in the ethical debate on nanotechnologies through a personal experience : current actions and perspectives

Coffee break

Renatech award : Elaboration de matériaux pour microbatterie 3D Li-ion par dépôt de couches atomiques (ALD) et caractérisations structurales operando

Renatech award : Sélection et capture de biomarqueurs moléculaires et cellulaires dans un fluide complexe

Integration of technologies

Etching – Lithography – Nano-patterning

Integration of technologies

Conference closure

Lunch

	Mon. 20	Tue. 21	Wed. 22
08:00 09:00 10:00 11:00 12:00 13:00 14:00 15:00 16:00 17:00 18:00 19:00 20:00 21:00 22:00 23:00	Breakfast and registration 8:30 - 9:30 (1h) Breakfast and registration Exhibition hall Conference opening 9:30 - 9:45 (15min) Conference opening Turing's amphitheater Atomic Layer Etching: a precision technique to enable tomorrow's technology 9:45 - 10:15 (30min) Atomic Layer Etching: a precision technique to enable tomorrow's technology Turing's amphitheater Stéphanie Baclet (Oxford Instruments, UK) Patterning challenges for ultimate CMOS scaling and beyond CMOS nanofabrication 10:15 - 10:45 (30min) Patterning challenges for ultimate CMOS scaling and beyond CMOS nanofabrication Turing's amphitheater Jean-François de Marneffe (IMEC, Leuveu - Belgium) Etching – Lithography – Nano-patterning 10:45 - 11:00 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › Microstructuration of titanium for implantable components - Edouard Laudrel, Groupe de recherches sur l\'énergétique des milieux ionisés 10:45-11:00 (15min) Coffee break 11:00 - 11:20 (20min) Coffee break Exhibition hall Flash poster session 11:20 - 11:35 (15min) Flash poster session Flash poster session 1/2 Integration of technologies 11:35 - 11:50 (15min) Integration of technologies Turing's amphitheater › Planar HfOx ReRAM in CMOS BEOL using nanodamascene process - Marina Labalette, Laboratoire des Nanotechnologies et Nanosystèmes 11:35-11:50 (15min) Etching – Lithography – Nano-patterning 11:50 - 12:05 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › MOSFET III-V: from Planar to Ultra-Thin-Body and to Gate-All-Around design - Matej Pastorek, Institut d'électronique, de microélectronique et de nanotechnologie 11:50-12:05 (15min) Lunch 12:05 - 14:00 (1h55) Lunch Agora's restaurant Nitride nanowire LEDs : from rigid to flexible devices 14:00 - 14:30 (30min) Nitride nanowire LEDs : from rigid to flexible devices Turing's amphitheater Maria Tchernycheva (C2N - CNRS/UPSud, Orsay) Synthesis of materials 14:30 - 14:45 (15min) Synthesis of materials Turing's amphitheater › Selective sublimation of GaN for top-down fabrication of nanostructures - Damilano Benjamin, Centre de recherche sur l'hétéroepitaxie et ses applications 14:30-14:45 (15min) Nanoscale surface engineering by photon-assisted nanoimprint technology 14:45 - 15:15 (30min) Nanoscale surface engineering by photon-assisted nanoimprint technology Turing's amphitheater Angélique Luu-Dinh (CSEM, Nauchatel - Switzerland) Etching – Lithography – Nano-patterning 15:15 - 15:30 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › Environment-controlled sol-gel soft-NIL processing for optimized imprinting at sub-micron dimensions. - Thomas Bottein, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence 15:15-15:30 (15min) Coffee break 15:30 - 15:50 (20min) Coffee break Exhibition hall Etching – Lithography – Nano-patterning 15:50 - 16:05 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › Fabrication of versatile calibration samples for 3D super-resolution optical imaging with <5nm Z resolution using greyscale e-beam lithography and Nano-Imprint replication - Alexandre LAUVERGNE, Laboratoire d'Analyse et d'Architecture des Systèmes [Toulouse] - Franck Carcenac, Laboratoire d'Analyse et d'Architecture des Systèmes [Toulouse] 15:50-16:05 (15min) Exhibitor's session 16:05 - 16:25 (20min) Exhibitor's session Exhibitor's session Flash poster session 16:25 - 16:40 (15min) Flash poster session Flash poster session 2/2 Poster session / Lab. tour 16:40 - 18:40 (2h) Poster session / Lab. tour Poster session / Lab. tour	Breakfast 8:00 - 8:30 (30min) Breakfast Exhibition hall Surfaces and interfaces bioengineering: functionalization, characterization and application 8:30 - 9:00 (30min) Surfaces and interfaces bioengineering: functionalization, characterization and application Turing's amphitheater Vincent Humblot (LRS - UPMC, Paris and GDR B2i) Surface functionnalization and processing 9:00 - 9:30 (30min) Surface functionnalization and processing Turing's amphitheater › Gold nanorod aggregation in presence of thiolated oligonucleotides - Henryk Laszewski, Laboratoire de Biologie et de Pharmacologie Appliquée 09:00-09:15 (15min) › Flexible long-range plasmon waveguides for single-mode optical interconnects applications - Laurent Markey, Laboratoire Interdisciplinaire Carnot de Bourgogne 09:15-09:30 (15min) Nanoparticle assembly: controlling topography and capillary forces at the nanoscale to build functional devices 9:30 - 10:00 (30min) Nanoparticle assembly: controlling topography and capillary forces at the nanoscale to build functional devices Turing's amphitheater Valentin Flauraud (EPFL, Lausanne - Switzerland) Coffee break 10:00 - 10:20 (20min) Coffee break Exhibition hall Surface functionnalization and processing 10:20 - 10:35 (15min) Surface functionnalization and processing Turing's amphitheater › Periodic nanostructures formed on mesoporous silicon surface using ultrashort pulse lasers - Nadjib SEMMAR, Groupe de recherches sur l'énergétique des milieux ionisés 10:20-10:35 (15min) Integration of technologies 10:35 - 10:50 (15min) Integration of technologies Turing's amphitheater › How to build a Si NW-based transistor without nanoscale processing - Maxime Legallais, Laboratoire des matériaux et du génie physique [Grenoble], Laboratoire des technologies de la microélectronique 10:35-10:50 (15min) Etching – Lithography – Nano-patterning 10:50 - 11:05 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › Sub-micrometer 2D patterned 2 inches wafer using interferential and soft-UV NIL combined nanolithographies techniques - CELINE CHEVALIER, Institut des Nanotechnologies de Lyon 10:50-11:05 (15min) Controlling domain orientation in self-assembled block copolymer thin films for lithographic application 11:05 - 11:35 (30min) Controlling domain orientation in self-assembled block copolymer thin films for lithographic application Turing's amphitheater Michele Perego (IMM-CNR, Milano - Italy) Integration of technologies 11:35 - 12:05 (30min) Integration of technologies Turing's amphitheater › Folding Photonic Crystals: Semiconductors ORIGAMI - Jean-Louis Leclercq, Institut des nanotechnologies de Lyon - Site d'Ecully 11:35-11:50 (15min) › NANO-PROBING STATION INCORPORATING MEMS PROBES FOR 1D DEVICE RF ON-WAFER CHARACTERIZATION - Khadim Daffé, Institut d'électronique, de microélectronique et de nanotechnologie 11:50-12:05 (15min) Lunch 12:05 - 14:00 (1h55) Lunch Agora's restaurant Applications of large area graphene monolayers to electronic and biomedical devices 14:00 - 14:30 (30min) Applications of large area graphene monolayers to electronic and biomedical devices Turing's amphitheater Vincent Bouchiat (Néel, Grenoble) Surface functionnalization and processing 14:30 - 14:45 (15min) Surface functionnalization and processing Turing's amphitheater › Molecularly Imprinted Polymer Nano layers for the electrochemical detection of pesticides - Sarra BOUDEN, Interfaces, Confinement, Matériaux et Nanostructures 14:30-14:45 (15min) Etching – Lithography – Nano-patterning 14:45 - 15:00 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › MICROSTRUCTURING OF A CYLINDER BY COLLOIDAL PHOTOLITHOGRAPHY ON FUNCTIONAL TiO2 SOL-GEL - erieta katerina koussi, Laboratoire Huber Curien 14:45-15:00 (15min) Physical properties and stability of 3D and layered perovskite materials for photovoltaic applications 15:00 - 15:30 (30min) Physical properties and stability of 3D and layered perovskite materials for photovoltaic applications Turing's amphitheater Jacky Even (INSA-FOTON, Rennes) Coffee break 15:30 - 15:50 (20min) Coffee break Exhibition hall Synthesis of materials 15:50 - 16:05 (15min) Synthesis of materials Turing's amphitheater › IN SITU XPS CHARACTERISATION OF THE FIRST GROWTH STEPS OF SICN:H THIN FILMS FROM TETRAMETHYLSILANE-AMONIA MICROWAVE PLASMAS - Christophe Cardinaud, Institut des matériaux Jean Rouxel 15:50-16:05 (15min) Surface functionnalization and processing 16:05 - 16:20 (15min) Surface functionnalization and processing Turing's amphitheater › Contribution to the understanding of the first stages of metal surface nanostructuration based on He+ implantation: experiments and simulations - Anne-Lise THOMANN, Groupe de Recherches sur l'Energétique des Milieux Ionisés 16:05-16:20 (15min) Round table: companies and academics 16:25 - 17:40 (1h15) Round table: companies and academics Round table: companies and academics Poster session 17:40 - 18:40 (1h) Poster session Poster session Transportation 19:00 - 19:35 (35min) Transportation > to the castle Banquet 19:35 - 23:00 (3h25) Banquet Gala dinner's castle	Breakfast 8:00 - 8:30 (30min) Breakfast Exhibition hall Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology 8:30 - 9:00 (30min) Integration of a photovoltaic remote driver with high-voltage MEMS using standard CMOS technology Turing's amphitheater Yoshio Mita (VDEC - Université de Tokyo, Japan) Integration of technologies 9:00 - 9:45 (45min) Integration of technologies Turing's amphitheater › SUBMILLIMETER MULTIJUNCTION SOLAR CELLS DESIGNED FOR VERY HIGH CONCENTRATION PHOTOVOLTAICS - Pierre Albert, Institut Interdisciplinaire d'Innovation Technologique, Laboratoire de l'Intégration du Matériau au Système 09:00-09:15 (15min) › ZnO nanostructures for electronics : from transistors to nanogenerators - Guylaine POULIN-VITTRANT, GREMAN 09:15-09:30 (15min) › Robotics assembly for Lab on Fiber new nanoprobes. - Jean-Yves Rauch, FEMTO-ST 09:30-09:45 (15min) The Involvement of scientists in the ethical debate on nanotechnologies through a personal experience : current actions and perspectives 9:45 - 10:15 (30min) The Involvement of scientists in the ethical debate on nanotechnologies through a personal experience : current actions and perspectives Turing's amphitheater Christophe Vieu (LAAS - CNRS, Toulouse) Coffee break 10:15 - 10:35 (20min) Coffee break Exhibition hall Renatech award : Elaboration de matériaux pour microbatterie 3D Li-ion par dépôt de couches atomiques (ALD) et caractérisations structurales operando 10:35 - 10:50 (15min) Renatech award : Elaboration de matériaux pour microbatterie 3D Li-ion par dépôt de couches atomiques (ALD) et caractérisations structurales operando Turing's amphitheater Manon Letiche (IEMN, Villeneuve d'Ascq) Renatech award : Sélection et capture de biomarqueurs moléculaires et cellulaires dans un fluide complexe 10:50 - 11:05 (15min) Renatech award : Sélection et capture de biomarqueurs moléculaires et cellulaires dans un fluide complexe Turing's amphitheater Hélène Cayron (LAAS - CNRS, Toulouse) Integration of technologies 11:05 - 11:20 (15min) Integration of technologies Turing's amphitheater › AlAs/InAlAs superlattice as a sacrificial layer for the epitaxial lift-off of low band gap III-V heterostructures lattice-matched to InP - François Chancerel, Laboratoire Nanotechnologies Nanosystèmes (LN2)- CNRS UMI-3463, Institut des nanotechnologies de Lyon 11:05-11:20 (15min) Etching – Lithography – Nano-patterning 11:20 - 11:35 (15min) Etching – Lithography – Nano-patterning Turing's amphitheater › Photolithography and transfer by reactive ion etching of high resolution features from an ecofriendly and water developpable chitosan resist - mathieu caillau, Institut des nanotechnologies de Lyon 11:20-11:35 (15min) Integration of technologies 11:35 - 11:50 (15min) Integration of technologies Turing's amphitheater › Packaging of electronic devices using 3D printing technology - Gabrielle Aspar, Laboratoire dÉlectronique et des Technologies de lÍnformation 11:35-11:50 (15min) Conference closure 11:50 - 12:05 (15min) Conference closure Turing's amphitheater Lunch 12:05 - 14:00 (1h55) Lunch Agora's restaurant